Heater for semiconductor thermal processing furnace with a new shape.
A heater with excellent surface temperature uniformity of the wafer and outstanding heating and cooling characteristics.
XYZ is a heater for semiconductor thermal processing furnaces with a new shape. It excels in surface temperature uniformity of wafers and heating and cooling characteristics. 【Features】 ■ Control thermocouples Inserted into the heater sidewall (4 for control, 4 for over-temperature protection, with adjustment mechanism) ■ Insulation material Outer circumference: Fine flex paper Inner circumference: High purity fiber mold *Comprehensive catalog available. For more details, please contact us or download the PDF to view.
- Company：三幸
- Price：Other
